In the annealing process, wafers are heated
to a well-defined temperature for a specific amount of
time in a conditioned atmosphere (inert, oxidizing, reducing).
The temperature, time and type of atmosphere used in an
annealing process depends on the purpose of the anneal
and the type of surface being treated. Annealing may be
used to remove impurities (mostly oxygen) from the surface
layers or to cause implanted ions to diffuse further into
the silicon.
Next Step :: Ion
Implantation
Next Step :: Processing ::
Testing
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