Etching techniques are used to remove material
from wafers. In wet chemical etching processes, the wafers
are immersed in a liquid solution, which removes the unwanted
material. When used in combination with deposition and
photolithography, etching allows the removal of material
in patterns defined by the masks containing the shapes
and sizes of the desired structures. Dry etch is etching
with a beam (plasma or ionic.)
There are several dry etching and wet etching techniques and
each is used for different purposes. The techniques differ
in the quality of the etch achieved, the level of detail the
etch can achieve, the exact shape of the edges of the etched
material, the material you are trying to etch, and the cost.
Dry Etch |
Wet Etch |
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